Shanghai Aishengna named as the maker of China's first domestic immersion DUV chipmaking tools — first viable domestic 7nm-capable scanner to be completed by 2038

Reuters said Shanghai Aishengna Electronic Technology Group is producing China’s first domestic immersion DUV lithography scanners.

The company was founded in 2023 and is linked to state-backed efforts to localize semiconductor equipment.

Its tools are expected to be used by SMIC, Hua Hong Semiconductor, and CXMT.

China still faces bottlenecks in photoresists, excimer lasers, and precision optics, limiting domestic DUV output and advanced-node scaling.

Immersion DUV is crucial for advanced chipmaking without EUV, so a local source could reduce dependence on foreign equipment and support 7nm-class production.