China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT

A state-backed Shanghai firm has reportedly begun mass production of homegrown immersion DUV lithography tools.

First shipments are expected this year to SMIC, Hua Hong Semiconductor, and ChangXin Memory Technologies.

The machines are mostly built with domestic parts, though some Japanese components are still used and supplier delays have slowed production.

If successful, the tools could reduce China’s reliance on ASML for mature-node chip production and blunt export-control pressure.