ASML spinout Invisix raises €20 million to inspect chips using X-ray technology

ASML spinout Invisix raised €20 million from Hitachi Ventures, imec.xpand, Transition Ventures, Doosan Investment and an unnamed tier-1 chipmaker.

The Eindhoven startup is developing a production system for soft X-ray chip inspection, combining reconstruction software and machine learning.

Its technology can measure complex 3D structures that optical tools struggle to see, building on IP licensed from ASML and prior demos with Intel and imec.

Improved metrology could boost wafer yields at advanced nodes, an important bottleneck for AI and memory chips.